41万画素PtSiショットキ型赤外線CCDイメージセンサ : 情報入力
1994 年 18 巻 17 号 p. 7-12
詳細
1994 年 18 巻 17 号 p. 7-12
A 811×508 pixel PtSi Schottky-barrier infrared CCD image sensor which has the greatest number of pixels in Standard TV format has been developed. This image sensor has achieved a 38% fill-factor of 18×21μm size pixel by using l.0μm design rules. optimizing the fabrication processes which are mainly about BCCD and GUARD-RING had an effect on the achievement. The noise equivalent temperature difference with f/1.2 was 0.06K at 300K.
