Current Vacuum Microelectronics Activities in Korea

抄録

The 1st Korea-Japan Joint Vacuum Microelectronics Symposium was held in Seoul on July 9, 1993 in conjunction with the 5th Korean Vacuum Society Meeting. It was the predecessor of the 2nd Asian Vacuum Microelectronics Conference. It must be fortunate that the meeting has been extended to an Asia wide one. Ten invited speakers, five from each country presented talks at the Symposium. The Symposium was quite successful, and called intensive attention to the fields of vacuum microelectronics in Korea. The growing R & D activities, especially for the STM, AFM, FED, ELD, LCD and TFT technologies are noteworthy. A condiderable number of works have been reported at various academic meetings such as the Korean Vacuum Society Meeting, the Korean Semiconductor Conference, and group VME seminars. Recently, a new FEAD System developed and constructed by the J.D. Lee's Team of Seoul National University Semiconductor Research Center and Uni-Vacuum (Univac) was installed.