A new type TEM camera with high sensitivity and high resolution have been developed using avalanche-type image pickup tube. (1)Material of thin film scintillator, (2)Structure of lens system to transfer image from scintillator to pickup tube, and (3)Electon beam scanning system were discussed. As the results, it was found that (1)GSO(Gd_2SiO_5) single crystal scintilltor. (2)tandem lens system, and charge storage operation by the beam blanking scanning were useful.
