Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
P1-17 Structure Design of Single Crystal Silicon Acceleration Sensor Using Finite Element Metod
Sumio Sugawara, Hiroyuki Suzuki, Jiro Terada
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2005 Volume 26 Pages 71-72

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© 2005 Institute for Ultrasonic Elecronics
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