Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Transaction of the Joint Conference on Vacuum and Surface Science 2017 [I]
Determination of Threshold of Photoelectron Yield Spectroscopy (PYS) Using Machine Learning
Shinjiro YAGYUMichiko YOSHITAKEToyohiro CHKYOW
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2018 Volume 61 Issue 4 Pages 196-199


In order to analyze the threshold of photoelectron yield spectroscopy (PYS) automatically, we compared the accuracy of the analysis between a fitting (least squares method) method and a machine learning method.

Both methods are comparable in terms of the performance of analysis, but machine learning shows better performance in data with high noise components.

In the analysis of measured Au data, machine learning shows close to the analyzed value by an analyst, but the fitting method shows the different value due to the influence of a high signal intensity.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
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