Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Issue : Secondary Ion Mass Spectrometry (SIMS) —Recent Trends and Organic Analysis—
TOF-SIMS Analysis by Means of Cluster Ion Beam
— Possibility of Low-energy Bismuth Primary Ion Beam —
Takuya MIYAYAMA
Author information
JOURNALS RESTRICTED ACCESS

2018 Volume 61 Issue 7 Pages 435-439

Details
Abstract

Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) with low-energy bismuth cluster ion beam was investigated to achieve fragment-free ionization and high secondary ion yields of molecular ions. TOF-SIMS spectra taken by 2 keV Bi3 were compared with those taken by 54 keV Bi32+. 2 keV Bi3 spectra showed much less fragmentation of organic molecules and there were few atomic secondary ions of such as 1H and 12C. Moreover, secondary ions of intact molecules were clearly observed in 2 keV Bi3 spectra for some organic materials. Results suggest that low-energy bismuth primary ion beams are potential candidate for molecular ion detection in TOF-SIMS.

  Fullsize Image
Information related to the author

この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
Previous article Next article
feedback
Top