Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Issue : Maintenance for Vacuum Equipment and Components
Maintenance of Ultra-High Vacuum Instruments
—Focused on Soft X-Ray Radiation Beamlines—
Jun NAKAGAWA
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2018 Volume 61 Issue 8 Pages 528-532

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Abstract

Maintenance procedure for instrument used under ultra-high vacuum is described particularly focused on soft X-ray beamlines in synchrotron radiation facilities. The main concern is how to maintain UHV condition during and after the maintenance process.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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