Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Basics and Applications of Mass Spectorometer
International Standardization on the Definition and Characterization of Quadrupole Mass Spectrometer (1) Background of the Standardization and Definition of Sensitivity
Hajime YOSHIDA
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2019 Volume 62 Issue 5 Pages 276-281

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Abstract

Two ISO standards related to quadrupole mass spectrometer (QMS) are introduced ; one is ISO 14291:2012 Definitions and specifications for quadrupole mass spectrometer and the other is ISO/TS 20175:2018 Characterization of quadrupole mass spectrometers for partial pressure measurement. This paper consits of two parts. This first part includes the background that these ISO standards were developed and the definition of sensitivity and relative sensitivity factor of QMS.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。