International Standardization on the Definition and Characterization of Quadrupole Mass Spectrometer (2) Definition of Parameters to Specify the Characteristics and the Evaluation Method

Abstract

Two ISO standards related to quadrupole mass spectrometer (QMS) are introduced ; one is ISO 14291:2012 Definitions and specifications for quadrupole mass spectrometer and the other is ISO/TS 20175:2018 Characterization of quadrupole mass spectrometers for partial pressure measurement. This paper consits of two parts. This second part includes the definition of parameters to specify QMSs such as minimum detectable partial pressure, minimum detectable concentration, dynamic range, interference effect, mass resolution, and so on. The methods to evaluate these parameters is also introduced.