小型質量分析計システムとその応用

抄録

Miniaturization of the instruments is desiring in the industrial field because it enables easy mount to the process, less mounting space, handy tool, less requirement of electrical energy etc. The Small mass spectrometer system which includes analyzer and vacuum system is also effective tool for various fabrication processes. Atonarp Inc. have developed and released small mass spectrometer system for the molecular controlling process. Feature of this system are small, fast, easy operation, real time process monitoring, and also edge device for the big data analysis. This paper describes basis of small mass spectrometer and some engineering application examples of the mass spectrometer system including Lyophilization, thin film deposition, and thin film etching.