表面と真空
Online ISSN : 2433-5843
Print ISSN : 2433-5835
特集「2018年日本表面真空学会学術講演会特集号II」
フォトクロミック・ジアリールエテン表面における金属蒸着選択性
—現象・拡張性・応用—
辻岡 強
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2019 年 62 巻 7 号 p. 411-415

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Selective metal deposition on photochromic diarylethene (DAE) films, its extension and applications are introduced. Metal vapor is deposited on the colored DAE, but not on the colorless surface by vacuum evaporation. The core phenomenon of selective deposition phenomenon is metal atom desorption from the colorless DAE surface with a low glass-transition temperature, in which nucleation for metal film formation is suppressed. This phenomenon is not restricted to DAE films but a variety of organic films with a low glass transition temperature (Tg) are available. Selective metal-vapor deposition can be applied to various metal pattern formation in electronics and photonics fields. Metal-vapor integrated-deposition is demonstrated as a new function of low-Tg organic surfaces.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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