Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Recent Developments of Electron Beam Technologies
Electron Source for Scanning Electron Microscope
Yasunari SOHDA
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2020 Volume 63 Issue 1 Pages 25-29

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Abstract

Field-emission electron source and Shottky-emission electron source are used for higher-resolution scanning electron microscope (SEM). The resolution is limited by reduced brightness and electron energy distribution of electron source. The development of the electron source with higher reduced brightness and lower electron distribution is expected for future SEM.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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