Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Surface Modification and Coating for Vacuum Equipment
Contamination Control in Semiconductor Manufacturing Processes
Toyohiko SHINDO
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JOURNAL FREE ACCESS

2020 Volume 63 Issue 2 Pages 64-68

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Abstract

The cause of contaminations of the inner wall of the vacuum chamber and inside samples or wafers are thought to be metal particles.

The metal particles are generated due to corrosion of the chamber itself, pipes, various parts and flanges, made of metal such as stainless steel. In this paper I introduce surface treatment and its effect as countermeasure against metal contamination caused by corrosion of stainless steel.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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