Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Regular article
Establishment of Cleanliness Evaluation Method Using Ion Chromatography of Vacuum Equipment
Jun WATANABEShu OTSUSakae INAYOSHI
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2020 Volume 63 Issue 3 Pages 134-138

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Abstract

We worked on the development of technology for evaluating trace amounts of water-soluble impurities using Ion Chromatography(IC). The conditions were determined by grasping the measurement environment and the eluted ions from the equipment used for evaluation. For the sampling tool, we selected wipes and swabs with less eluting ions to reduce the effect on measured values and decided the evaluation procedure. It was found that analysis at the ppb level is possible by verifying IC measurement variability and detection limit. After grasping the background of the sampling tool, an L-shaped sample was manufactured and its cleanliness was evaluated. It was found that the amount of ions in the sample was larger than the background, and the difference was largely depending on the shape of the evaluation part. Therefore, we were able to establish a cleanliness evaluation method for vacuum equipment using IC.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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