2020 Volume 63 Issue 3 Pages 134-138
We worked on the development of technology for evaluating trace amounts of water-soluble impurities using Ion Chromatography(IC). The conditions were determined by grasping the measurement environment and the eluted ions from the equipment used for evaluation. For the sampling tool, we selected wipes and swabs with less eluting ions to reduce the effect on measured values and decided the evaluation procedure. It was found that analysis at the ppb level is possible by verifying IC measurement variability and detection limit. After grasping the background of the sampling tool, an L-shaped sample was manufactured and its cleanliness was evaluated. It was found that the amount of ions in the sample was larger than the background, and the difference was largely depending on the shape of the evaluation part. Therefore, we were able to establish a cleanliness evaluation method for vacuum equipment using IC.