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Online ISSN : 2433-5843
Print ISSN : 2433-5835
特集「微小エネルギーの観測と制御」
エレクトレット薄膜を用いた静電誘導型MEMS振動発電
年吉 洋本間 浩章三屋 裕幸橋口 原
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2020 年 63 巻 5 号 p. 223-228

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Electret or permanent electrical charge is used as a part of mechano-electric energy conversion system for vibrational energy harvesting device. Microscopic capacitors are produced by silicon micromachining or MEMS (microelectromechanical systems) fabrication process, and the surfaces are turned into impurity-rich silicon oxide, which is later processed to make an electret by displacing the impurity ions by the same mechanism as the anodic bonding. The built-in potential of the electret is used to produce electrical current through the electrostatic induction when the movable electrode is periodically shaken by the external vibrations. In this article, the fabrication processes for the electret as well as the MEMS vibrational energy harvester are discussed. The fundamental characteristics of the energy harvesters are reported, along with a demonstration result as an autonomous powerpack for an IoT (internet-of-things) type wireless sensor node.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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