Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Observation and Control of Micro Energy
Toward Large-scale Integration of Micro Thermoelectric Generator Using Si-nanowire
Motohiro TOMITA
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2020 Volume 63 Issue 5 Pages 229-234


We proposed a cavity-free planar device architecture of a Si-nanowire (NW) thermoelectric (TE) power generator with high affinity for Si-LSI process technology. In this generator, an external temperature difference is induced between a front-side and backside of the substrate without cavity. Thus, most of induced heat energy is wasted to the substrate. However, a diffused heat flow to in-plane direction maintains a temperature difference in the Si nanowires. The exuded heat flux formed a steep temperature gradient in Si-NWs. Then, the 10-µW/cm2 class high power is generated by our TE generator. In this paper, the design concept of the new Si-NW based TE generator is presented. A numerical and experimental demonstration of test devices is reviewed. The possibility of large-scale integration is discussed by designing the structure of our TE generator.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
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