Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Transactions of the Annual Meeting on the Japan Society of Vacuum and Surface Science 2019[I]
Development of Magnetic Mirror-type Magnetron Cathode
Taisei MOTOMURATatsuo TABARU
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2020 Volume 63 Issue 6 Pages 283-288

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Abstract

This paper describes the newly developed two magnetron sputtering cathodes with a magnetic mirror configuration for a low gas and power operation and an inward enlargement of the doughnut-shaped plasma discharge area. These cathodes were named Magnetic Mirror-type Magnetron Cathode (M3C). Those magnetic field profiles have a simple structure using two cylindrical permanent magnets placed behind the disk-shaped sputtering target. In the case of M3C ver.1 (M3C1), the magnetic mirror configuration near the target center and the target edges enables a low DC input power operation down to 5 W at 0.26 Pa (Ar). In the case of M3C ver.2 (M3C2), both a pinhole-centered magnet and a tilt of magnetization vector to the normal to the target surface play an important role for the inward enlargement of the plasma discharge area.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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