Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Transactions of the Annual Meeting on the Japan Society of Vacuum and Surface Science 2019[I]
Study of Reversal Contrast Phenomenon in SEM Images at Low Incident Accelerating Voltage by AES
Yusuke SAKUDA Shunsuke ASAHINAKenichi TSUTSUMIHiroshi ONODERA
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Keywords: SEM, AES, BSE
JOURNAL FREE ACCESS

2020 Volume 63 Issue 6 Pages 294-297

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Abstract

Recently it has become possible for SEM to obtain a backscattered electron image (BEI) at low incident voltages of 1 kV or less. However, it was reported that some brightness in the BEI acquired at low incident voltages was not always proportional to the average atomic number of the sample. In this study, we investigated contrast reversal phenomena of two elements (C and Au) in BEIs using backscattered electrons acquired by Auger electron spectroscopy (AES) at an incident voltage of about 1 kV.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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