2020 Volume 63 Issue 6 Pages 294-297
Recently it has become possible for SEM to obtain a backscattered electron image (BEI) at low incident voltages of 1 kV or less. However, it was reported that some brightness in the BEI acquired at low incident voltages was not always proportional to the average atomic number of the sample. In this study, we investigated contrast reversal phenomena of two elements (C and Au) in BEIs using backscattered electrons acquired by Auger electron spectroscopy (AES) at an incident voltage of about 1 kV.