Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Transactions of the Annual Meeting on the Japan Society of Vacuum and Surface Science 2019[IV]
Vertically Aligned, Small-diameter Single-walled Carbon Nanotube Growth from Ir Catalysts
Takahiro MARUYAMATakuya OKADAKamal Prasad SHARMATomoko SUZUKITakahiro SAIDAShigeya NARITSUKASumio IIJIMA
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2020 Volume 63 Issue 9 Pages 488-491

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Abstract

We demonstrated that vertically aligned single-walled carbon nanotubes (VA-SWCNTs) can be grown by alcohol catalytic chemical vapor deposition (CVD) using an Ir catalyst in a cold-wall CVD system. VA-SWCNTs were directly grown on SiO2/Si substrates with neither any buffer layers nor cocatalysts under an ethanol pressure of 1×10-1 Pa at 800℃. The SWCNT length became longer with increasing growth time and the VA-SWCNT thickness reached ∼4 µm after the growth for 180 min. The diameters of the grown SWCNTs were mainly distributed between 0.8 and 1.2 nm, which is much smaller than those from Fe and Co catalysts. X-ray absorption fine structure spectroscopy result showed that the Ir catalyst retained metallic phase during SWCNT growth, which is in marked contrast with SWCNT growth from Fe and Co catalysts.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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