表面と真空
Online ISSN : 2433-5843
Print ISSN : 2433-5835
特集:2019年日本表面真空学会学術講演会特集号Ⅳ
Ir触媒からの垂直配向した細径単層カーボンナノチューブ成長
丸山 隆浩岡田 拓也Kamal Prasad Shrama鈴木 智子才田 隆広成塚 重弥飯島 澄男
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2020 年 63 巻 9 号 p. 488-491

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We demonstrated that vertically aligned single-walled carbon nanotubes (VA-SWCNTs) can be grown by alcohol catalytic chemical vapor deposition (CVD) using an Ir catalyst in a cold-wall CVD system. VA-SWCNTs were directly grown on SiO2/Si substrates with neither any buffer layers nor cocatalysts under an ethanol pressure of 1×10-1 Pa at 800℃. The SWCNT length became longer with increasing growth time and the VA-SWCNT thickness reached ∼4 µm after the growth for 180 min. The diameters of the grown SWCNTs were mainly distributed between 0.8 and 1.2 nm, which is much smaller than those from Fe and Co catalysts. X-ray absorption fine structure spectroscopy result showed that the Ir catalyst retained metallic phase during SWCNT growth, which is in marked contrast with SWCNT growth from Fe and Co catalysts.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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