2020 年 63 巻 9 号 p. 470-475
To experimentally obtain the mass absorption coefficient (μ) of low-Z elements in soft X-ray regions using solid materials, soft X-ray absorption spectra in a 200～800 eV region of polyethyleneterephtalate (PET) film with a thickness of 700 nm were measured with the transmission and total electron yield (TEY) methods. Soft X-ray absorption measurements were performed in a beamline BL-6.3.2 at the Advanced Light Source (ALS). In O K region, XANES profile with absorbance was in good agreement with that with TEY, which suggests the sufficient transmission of X-rays in the PET film at the O K region. The measured μ spectrum in scattering region was also in good agreement with the calculated spectrum. The μ spectrum in photoelectric absorption region was successfully measured. Typical μ value of O in PET films can be determined as 2.2×104 cm2 g－1 at 542 eV (σ*).
