原子分解能ホログラフィー顕微鏡の開発

抄録

Atomic-resolution holography microscope is proposed, and has been composed by combining a small SEM and a new two-dimensional display-type analyzer CoDELMA. CoDELMA can display an angular distribution of emitted electrons from the sample up to ±50° with high energy-resolution at once. The electron beam size can be down to 20 nm, which ensures the spatial resolution of several tens nm. A holographic reconstruction from the angular distribution of Auger or energy-loss electrons emitted from selected atomic species reveals the three-dimensional atomic arrangement around the atom. Hence this system works as an atomic-resolution holography microscope, which can reveal the three-dimensional atomic arrangement around the selected atomic species in nm region for the first time.