特集「マイクロビームアナリシス技術部会特集号」
絶対測定に基づくオージェおよび二次電子スペクトルのデータベース
2021 年 64 巻 10 号 p. 476-481
詳細
2021 年 64 巻 10 号 p. 476-481
The Division of Microbeam Analysis, the Japan Society of Vacuum and Surface Science, publishes the Database for Auger and Secondary Electron Spectra online (https://www.jvss.jp/division/mba/sedb/). These spectral data were measured with an SI traceable cylindrical mirror analyzer developed by Keisuke Goto (absolute measurement system). The database body stores measurement data and spectra of 56 materials and 47 materials as an appendix. This paper reports the concept and characteristics of the absolute measurement system and introduces the electron spectra database.
