特集「Society 5.0時代を創出する異種材料集積半導体デバイス」
Siエレクトロニクスの展望と異種機能・異種材料集積化
2021 年 64 巻 2 号 p. 62-67
詳細
2021 年 64 巻 2 号 p. 62-67
The advancements of Si electronics from the past to the present are reviewed and the future technological trends are discussed based on the semiconductor roadmap. The development of the heterogeneous integration is also discussed.
