A diaphragm gauge is a vacuum gauge that utilizes the phenomenon that the diaphragm is elastically deformed by the pressure directly received from the gas to be measured. Due to this measuring principle, it is possible to measure the degree of vacuum with high accuracy regardless of the type of gas to be measured. However, it is known that the diaphragm itself is easily affected by heat and mechanical vibration and causes measurement error. To solve these problems, we have developed a MEMS pressure sensor diaphragm gauge that uses Si as the diaphragm material. As a result, we were able to overcome the conventional problems.