表面と真空
Online ISSN : 2433-5843
Print ISSN : 2433-5835
特集「ものを隔てる膜の表面・真空科学」
隔膜真空計の原理と技術
大沼 永幸
著者情報
キーワード: capacitance, diaphragm, displacement, MEMS
ジャーナル 認証あり

2021 年 64 巻 4 号 p. 174-178

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A diaphragm gauge is a vacuum gauge that utilizes the phenomenon that the diaphragm is elastically deformed by the pressure directly received from the gas to be measured. Due to this measuring principle, it is possible to measure the degree of vacuum with high accuracy regardless of the type of gas to be measured. However, it is known that the diaphragm itself is easily affected by heat and mechanical vibration and causes measurement error. To solve these problems, we have developed a MEMS pressure sensor diaphragm gauge that uses Si as the diaphragm material. As a result, we were able to overcome the conventional problems.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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