表面と真空
Online ISSN : 2433-5843
Print ISSN : 2433-5835
特集「2020年日本表面真空学会学術講演会特集号Ⅲ」
Co-sputterによるβ-FeSi2薄膜の組成と光学特性の制御に関する研究
Xuanwei ZhangSamir Kumar名村 今日子鈴木 基史
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2021 年 64 巻 9 号 p. 418-423

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β-FeSi2 is expected to produce an efficient bandpass filter for its bulk is transparent and has a high refractive index (for wavelength>1.55 µm). However, it was found that β-FeSi2 thin film has a different extinction coefficient from the bulk and a significant absorptance in the infrared region. We carried out experiments to research the relationship between the absorptance and composition of β-FeSi2 thin film using co-sputtering by control the applied power on FeSi2 and Si targets. The β-FeSi2 thin film deposited at an applied power of 10~12 W on Si target had a correct stoichiometry and the minimum absorptance of approximately 0. It is suggested that high refractive index and low extinction coefficient in the infrared spectrum of β-FeSi2 thin film can be successfully produced in this method and used for bandpass filters to enhance the efficiency in the Thermophotovoltaic power generation system.

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https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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