BeCu合金材料の表面分析と真空特性

抄録

BeCu material has the characteristics of high thermal conductivity and low thermal emissivity, which can reduce temperature rise. Furthermore, BeCu material is able to reduce the outgassing with the special heat treatment. These characteristics make it easier to get a high vacuum. The surface structure of BeCu material was confirmed by X-ray photoelectron spectroscopy (XPS) analysis, the absorbed gas in the material was measured by thermal desorption spectroscopy (TDS), and the outgassing from the material were measured by a build-up test. These test results confirmed that BeCu material has excellent vacuum properties.