原子間力顕微鏡による局所弾性率測定法の国際標準化と素材産業への展開

抄録

This paper describes the international standardization activities of ISO/TC201/SC9/WG7, including the standardized method and a new method currently undergoing international round-robin testing for local elastic modulus measurement using atomic force microscopy, future prospects including extension to viscoelastic measurement. This paper will also include examples of how the local elastic modulus measurement method can be utilized in the materials industry.