Spectral interference from 65 elements (200μg ml
-1) with the emission lines of 16 elements (5μg ml
-1) in a vacuum ultraviolet (VUV) region was investigated. Spectral interference from Os was vely severe, possibly due to the use of a OsO
4 solution which was volatile even at room temperature. In addition, it was revealed that the most sensitive As 193.76 nm line was subjected to spectral interference from Eu. For some elements such as Ca etc., emission lines in a VUV region were considered to be more useful than the conventional emission lines in a visible or violet region for the analysis of samples containing large amounts of coexisting elements.
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