We investigate fundamental parameters of a microwave discharge oxygen plasma, which is freely expanding in atmospheric pressure. Electron temperature, electron density, gas temperature are measured by line intensity measurement. Density of atomic oxygen is measured by laser induced fluorescence spectroscopy (LIFS). Experimental results show that the plasma is in a state of non-equilibrium in the plasma upstream region, and becomes close to the state of equilibrium as going downstream. There exists high concentration of atomic oxygen in the upstream region.
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