Development of millimeter size insect type locomotion robots with hardware neural networks controls is described in this paper. The mechanical component of the robot is fabricated from silicon wafers with high accuracy by MEMS (Micro Electro Mechanical Systems) process that is based on IC (Integrated Circuit) production lines. An impact type rotary actuator with a multilayer piezoelectric element, and rotary actuator with artificial muscle wires that are kind of shape memory alloy, are developed. Combining link mechanisms with the rotary actuator, the footstep locomotion similar to that of insects is achieved. Hardware artificial neural networks that mimic living organisms are applied for the control of the robot. The artificial neural networks for the piezoelectric impact rotary actuator is composed of discreet circuits. However, CMOS (Complementary Metal-Oxide Semiconductor) neural networks IC is developed for the artificial muscle wire rotary actuator. Each artificial neural networks is connected to the robot via extended circuits and then realizes the locomotion of the robot by the insect like foot step. The size of the piezoelectric impact type robot is 4.6 mm, 4.0 mm and 3.6 mm, length, width and height, respectively. Also, the size of the artificial muscle wire robot is 2.7 mm, 4.0 mm, 2.5 mm. The each locomotion speed of the robot is 180 mm/min and 26.4 mm/min, respectively.
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