巻号一覧
59 巻, 4 号
選択された号の論文の8件中1～8を表示しています
- |<
- <
- 1
- >
- >|
-
藤根 道彦, 伊藤 清孝, 浅野 光章, 遠藤 博司1988 年 59 巻 4 号 p. 227-232
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーAdvanced semiconductor industries have recently required various high purity metals such as W, Mo, Si, Al, Ti and Ta. Especially manufacturers of more integrated semiconductors need purer materials with the very low harmful impurities, for example alkali (Na and K), radioactive (U and Th) and transition (Fe, Ni, Co and others) elements.
The materials for gate electrode of MOS-LSI (Metal-Oxide-Semiconductor-Large-Scale-Integrated-circuits) are being shifted from poly-Si to high purity W-Si or Mo-Si and will be changed to ultrahigh purity W or Mo in the near future. Therefore it is vital to eliminate the impurities mentioned above from commercially available tungstic or molybdic compounds.
In order to refine them the authors tested chemical processes i.e., is solvent extraction, ion exchange and crystallization. These chemical refinings have proven effective to remove alkali, alkaline-earth and transition elements. So, for the production of high purity metallic W and Mo, it is important to consider the features of the refining processes.抄録全体を表示PDF形式でダウンロード (287K) -
坂 貴1988 年 59 巻 4 号 p. 233-242
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーDeep levels in semiconductors grown by MOCVD were investigated by DLTS and ICTS methods. The dependence of concentrations of levels on growth conditions was studied. Especially, the influence of interruption of growth that is often necessary for heteroepitaxial layers was investigated.
For undoped GaAs, accumulation of carrier was induced by the interruption. The carrier is due to shallow level, the concentration being-1016cm-3. Furthermore, deep levels localized near the surface (within the thickness of 550nm) were observed. These consist of multiple or continuous levels. These were observed irrespectively of the growth condition.
The interruption of growth at junction surfaces of pn-GaAs and Ga0.7 Al0.3 As caused pile of O that was not observed for undoped GaAs. This was confirmed by SIMS. The pile was entirely removed by thermal etching in the case of GaAs. However, this still remained for GaAlAs. Therefore, the status of O is different. New deep levels induced by thermal etching were observed for both cases. The condition for getting clean surface by thermal etching is now inquired.抄録全体を表示PDF形式でダウンロード (375K) -
加藤 剛志, 山田 博之, 藤根 道彦, 野口 宏1988 年 59 巻 4 号 p. 243-249
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーRefractory and reactive metals such as W, Ta, Mo, Nb and Ti were melted by a 300kW Electron Beam (EB) Melting Furnace and the evaporation behavior of metallic and gaseous impurities was investigated.
It was found that, when the vapor pressure of a metallic element, poi, was higher than 104Pa at the temperature 100°C over the melting point of mother metal, the content of the element could be decreased to less than 1ppm. The decrease of oxygen content was also observed except for the melting of Ti. However, the other metallic elements with low vapor pressure and gaseous species such as C and N were less removable, in spite of the melting under the condition of ultra high temperature and ultra low pressure.抄録全体を表示PDF形式でダウンロード (775K) -
加藤 哲男, 草加 勝司, 山道 吉和, 仁後 悟1988 年 59 巻 4 号 p. 250-262
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーAn investigation was made on high-alloy fine powders-to build up specific hybrid powders with iron core powders-which were produced Ni, Mo, Cr etc-concentrated by high-pressure water atomization.
The results obtained of these hybrid powders are as follows:(1) All the hybrid powders may possibly be processed according to conventional iron powder making technique and hence show good compressibility and sinterability as compared with prealloyed ones concerned.
(2) 4600/4800 (Ni-Mo) type sintered steels have tensile strength of over 60kgf/mm2 (C<0.2%), although having a little heterogeneous matrix mainly due to lower diffusivity of Ni.
(3) When S of 0.3% added, 4600/4800 type sintered steels show the improved machinability for drilling test-especially, tool life increased to almost double figures-with no loss of mechanical properties.
(4) 4100 (Cr-Mn) type sintered steels have tensile strength of 80kgf/mm2 accompanied by fair toughness, successfully for the good combination of vacuum-sintering and heat-treatment.抄録全体を表示PDF形式でダウンロード (3543K) -
茂木 文吉, 伊藤 清孝, 岡本 典子, 成田 正尚, 藤根 道彦1988 年 59 巻 4 号 p. 263-270
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーDetermination of trace impurities, such as Na, K, Mg, Al, Ca, Cr, Mn, Fe, Co, Ni, Cu, Th, U, in high-purity Mo and W, was studied.
The instruments used were a flameless-AAS for Na and K, a fluorescence spectrometer for U and others for ICP-AES. The analytical methods were examined for every element in order to elevate the sensitivity and the accuracy.
As the results, it was confirmed that the detection limits are less than 0.05ppm.抄録全体を表示PDF形式でダウンロード (334K) -
杉山 幸三1988 年 59 巻 4 号 p. 271-281
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーCVI (Chemical Vapor Infiltration) and pulse CVI process are reviewed. CVI is prominent in tight bonding between reinforcing fiber and matrix, however, is inferior in tedious processing time, nonuniformity of infiltration along the thickness and a limitation of the shapes of preform. On the contrary, powder-and fiber-preforms and porous materials with free shape can be infiltrated by pulse CVI. Pulse CVI of SiC from CH3SiCl3-H2 to porous carbon resulted in oxidation resistance over 1070h at 1573K in an air flow, and also increase of flexural strength by 2-3 times. RF-heated carbon fiber wound around carbon plate was effectively infiltrated by SiC. SiC powder preform, average particle size of 10μm, was strengthened to flexural strength of 240MPa after 30000 pulse of CVI. A combination of Si3N4 powder and BN matrix is also refered.抄録全体を表示PDF形式でダウンロード (2948K) -
山田 博之, 河野 富夫, 清水 孝純, 芝田 智樹1988 年 59 巻 4 号 p. 282-287
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーTi-Cu-Ni-Zr amorphous ribbon was prepared by rapid solidification technology. This material is considered to be usefull for the filler metal of Ti and its alloys because of its peculiar feature, such as relatively low melting point (1103K) and excellently good toughness.
From the investigation of brazed joint of Ti and its alloy with this amorphous filler, it was found that the brazing joint had equally high ultimate tensile strength as the mother metal. It was also found by the EPMA inspection, that high tensile strength could be achieved by sufficient diffusion of filler elements and united structure of filler metal and mother metal.
This amorphous ribbon has been industrially applied for the construction of Ti glasses flame, Ti plyer and so on.抄録全体を表示PDF形式でダウンロード (1861K) -
市川 二朗, 上松 周一郎1988 年 59 巻 4 号 p. 288-293
発行日: 1988/10/15
公開日: 2009/06/16
ジャーナル フリーA new type of fiber reinforced thermoplastic intermediate material has been developed. It consists of reinforcing fiber roving and thermoplastic resin sheath. It has high flexibility and is easy to be woven and braided.
The advantages of the material are high productivity of end products, possibility to reform, easy handling and easy stroring which are from the nature of thermoplastic, and also the flexibitity and protection of reinforcing fibers of the material leads to easy arranging and laying-up in the mold.
Two applications of the new intermediate material have been developed, which are made use of the characteristics.
New FRP bolts were made by reforming of GF-polyamid 6 pultruded rod, and proved higher strength compared to injection-molded bolt.
CF-polyamid 6 belleville spring consisting of circumferential fibers and radial fibers could realize high spring constant and fatigue character at the same time.抄録全体を表示PDF形式でダウンロード (1401K)
- |<
- <
- 1
- >
- >|