The specimens from the pure titanium plate were treated for the mechanical polishing using the emery paper, the chemical polishing using the HF/HNO
3 polishing bath, and the electropolishing using the mixture of ethanol, n-butanol, ZnCl
2, A1Cl
3 as an electrolyte. XPS analysis on the polished surdace and subsequently sputtered surface was performed.
The peaks of O, Ti, C were found in all specimens. The ratio of O/Ti calculated from the atomic concentration of the specimens after sputtering was about 2.0 in all specimens. Therefore the oxide film (TiO
2) wa considered to be formed on the surface of specimens treated by every polishing procedures. Besides the evident peaks of 0, Ti, and C, featured peaks were observed such as Si in the mechanically polished surface, F in the chemically polished surface, and Zn and Cl in the electropolished surface. Therefore these elements were considered to react titanium and were incorporated into oxide film.
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