Electrochemistry
Online ISSN : 2186-2451
Print ISSN : 1344-3542
ISSN-L : 1344-3542
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72 巻, 8 号
選択された号の論文の17件中1~17を表示しています
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  • 小寺 雅子, 植草 新一郎, 皆川 澄人, 西岡 由紀子, 福永 明, 辻村 学
    2004 年72 巻8 号 p. 569-576
    発行日: 2004/08/05
    公開日: 2019/06/08
    ジャーナル フリー

    In current Cu/low-k damascene processing, post-CMP cleaning poses much more difficulty than in early processes, due to variation in the kinds of slurry and cleaning solutions developed for low-k materials. Though reports have addressed the performance of a number of cleaning chemicals, the mechanism of post-CMP cleaning is not well understood. Therefore, we performed FT-IR measurements, AFM observations, and electrochemical analyses of certain kinds of slurry and chemicals and investigated the mechanisms of Cu CMP and post-cleaning. In the case of cleaning chemicals that showed good performance, FT-IR and AFM measurements indicated that the surface of Cu was clean, and CV (Cyclic Voltammetry) measurement showed that these cleaning chemicals easily reacted with Cu. These findings suggest that slurry components are removed by the cleaning solutions. However, we also found that the effectiveness of cleaning chemicals was sometimes impaired by components of the slurry. In a combination of chemical and slurry that resulted in poor performance, much more residues were observed to remain on the Cu surface. This phenomenon can be explained by the competitive reaction between the slurry and the chemical. In short, the cleaning chemical reaction is impeded by certain elements in the slurry.

ノート
  • 板垣 昌幸, 長谷川 元, 渡辺 邦洋, 蜂谷 敏徳
    2004 年72 巻8 号 p. 577-580
    発行日: 2004/08/05
    公開日: 2019/06/08
    ジャーナル フリー

    A channel flow double electrode (CFDE) was fabricated in order to investigate oxygen reductions with powder type of perovskite oxides. The clay electrode, which consisted of the perovskite oxide powder, carbon powder and binder, was used as the working electrode. From the measurement of the electrochemical impedance, the resistance of the clay electrode was confirmed to be small enough to use in the electrochemical measurements. The collecting electrode current was measured and plotted against the working electrode potential, and the amount of evolved hydrogen peroxide was determined. Moreover, the average number of charge transfer was calculated from the working and collecting electrode currents. The values of were approximately 4 for LaMnO3.15, 3 - 4 for LaMnO3, and 2.5 - 4 for LaFeO3. In the course of the above-mentioned experiment, the ability of the CFDE for the study of oxygen reduction catalytic activity of powder oxide has been confirmed.

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