Polyphenylene sulfide film was treated with low-temperature oxygen, nitrogen, and argon plasmas, argon sputter etching, and low-temperature helium/argon plasma under atmospheric pressure, and then the surface characteristics were investigated by means of critical surface tension and ESCA measurement. Critical surface tension and the O
1s intensities in ESCA spectra were increased considerably after discharge treatments. By helium/argon atmospheric low-temperature plasma treatment, the N
ls and O
1s intensities increased remarkably. From wave form separation of C
ls and S
2P spectra, it was found that oxygens incorporated in the polymer are present in the forms of -C-O-, -COO-, -S(=O)-, and -S(=O)
2-. The oxygens incorporated by atmospheric low-temperature plasma treatment caused considerable increase of -S(=O)2-intensity.
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