Image analysis is now regarded as a new promising technique for material evaluation. In this paper, a computer-aided electron probe micro analyzer (CMA) which was recently developed by the author, is described as a typical example of a new image analyzer, regarding to its principle, apparatus, method and applications. The merits of introduction of image analysis into material evaluation are summarized as follows. Rapidity and reliability of analytical informations are much improved. Moreover, establishment of a new evaluation method, even if its principle is the same to the conventional method, can be expected by the introduction of image analysis.
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