Inelastic electron tunneling spectroscopy (IETS) is employed to investigate adsorption LangmuirBlodgett monolayers deposited on silicon substrate with a thin SiO
2 film. IETS measurement is very sensitive and useful for characterization of ultra thin organic films. However, in the general IETS measurement, IETS contains unessential signal due to leakage current, contamination, etc. In this study, the tunnel junction on the same Si substrate is used as the reference in order to eliminate these difficulties. First, the effects of the reference were examined using imitative samples composed of three kinds of diodes and resistance. From these results, the use of reference in IETS mesurement is very useful to obtain the essential signal. Second, IETS of LB film of dodecyl tetracyanoquinodimethane (C
12 TCNQ) at 20K were measured. It was clearly shown the effects of the reference tunnel junction such as a significant suppression of background level and extraction of fine structures corresponding to C
12TCNQ vibration modes.
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