When an electromagnetic wave is injected at angle Θ0 of incidence into the plasma, which has a density gradient, the elecromagnetic wave is reflected at the cut-off plane nr=cn(cos2Θ0). In the lower density region from the cuo-off plane, a standing wave of electromagnetic wave is generated. In this case, it is well known that the electric field will be enhanced in front of the cut-off plane. Therefore, it could be expected that this enhanced fild would produce plasmas by ionization in the neighborhood of the cut-off plane.
Even if a microwave field is injected into the lower pressure neutral gasses, in case of no magnetic field, the microwave discharge will not generally occur. But, when the microwave is injected into the target plasma which was generated by RF discharge, so far as this paper is concerned, the above described ionization occurs. As a result of our experiments, it is clarified that the microwave ionization occurs, when the cut-off plane exists within the RF coil for the plasma production.
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