The concept of a novel ozone generator that has a high ozone formation efficiency has been developed. The novel ozone generator consists of a dissociation chamber, an ejector, and an ozone formation chamber. In the dissociation chamber filled with pure oxygen gas at a low pressure, a nonequilibriurn electric discharge dissociates oxygen molecules into oxygen atoms. The gas containing oxygen atoms is drawn from the chamber and stirred into air of the second material gas by the ejector, and is transferred into the ozone formation chamber. The oxygen atoms are efficiently converted into ozone molecules by three body collisions under a high gas pressure in the ozone formation chamber. A simulation code describing the ozone formation process reveals the characteristics of this O/O
3 different-space-generation system. It has a high O
3 formation efficiency in a low O
3 concentration range. According to the simulation result, it can generate the O
3 of 0.135 mol% with the efficiency of about 200g/kwh, which is about three times larger than that of the conventional air-fed ozone generator.
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