電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
127 巻, 3 号
選択された号の論文の4件中1~4を表示しています
Special Issue on Atmospheric Plasmas and their Applications
Special Issue Paper
  • Nozomi Takeuchi, Koichi Yasuoka, Shozo Ishii
    2007 年 127 巻 3 号 p. 133-138
    発行日: 2007年
    公開日: 2007/06/01
    ジャーナル フリー
    The characteristics of electrohydrodynamic (EHD) flow induced by an asymmetric surface barrier discharge were investigated by changing the discharge parameters, such as transferred charge, sustaining voltage, and driving frequency, and so on. The discharge induced the EHD flow close to the dielectric surface, and the flow velocity was up to several m/sec. There was a strong polarity effect on the peak value of the discharge current. Intense microdischarges were generated when the relative potential of the buried electrode was negative to the exposed electrode, whereas only weak microdischarges were measured when the buried electrode was positive. The mean flow velocity was found to be proportional to the discharge power that was nearly a quadratic function of the sustaining voltage and a linear function of the driving frequency. The increasing rate of the flow velocity for the discharge power was high in higher power operations, where the sustaining voltage was increased by higher voltage application between the electrodes. The flow velocity was proportional to the total amount of electric charges, but it was largely affected by the increase of the sustaining voltage.
  • Tadahiro Sasaki, Reina Omukai, Seiji Mukaigawa, Koichi Takaki, Tamiya ...
    2007 年 127 巻 3 号 p. 139-144
    発行日: 2007年
    公開日: 2007/06/01
    ジャーナル フリー
    This paper describes characteristics of capacity coupled discharge in atmospheric pressure air with focusing influence of gap length of point-to-plane electrode configuration on input power into the discharge. The discharge can be quenched in short time duration by inserting a small capacitance capacitor between the electrode and the ground. We employed a needle electrode and a coaxial cable as the quenching capacitor. The discharge was successfully quenched within 25 ns in duration according to 9.4 pF in a capacitance of the quenching capacitor. The discharge was classified as two modes; a spark mode and a corona mode. At the spark mode, the power consumed in the discharge plasma was almost 10 times as large as that of a conventional dielectric barrier discharge. At the corona mode, the consumed energy was almost same value with that of the dielectric barrier discharge. A velocity of the discharge development was obtained to be 3×105 m/s by an optical measurement.
  • Tetsuji Oda, Koichi Ono, Ryo Ono
    2007 年 127 巻 3 号 p. 145-150
    発行日: 2007年
    公開日: 2007/06/01
    ジャーナル フリー
    Atmospheric pressure nonthermal plasma has very high chemical reactivity and can decompose various toxic materials. The authors are engaged in decomposing the various kinds of VOCs (volatile organic compounds) by using the nonthermal plasma (typically barrier discharge reactor). To improve the energy efficiency, modification of the plasma reactor has been done. A new catalyst, manganese dioxide—supported alumina sphere of 3 mm in diameter was manufactured by ourselves for the combined process with the plasma. That can decompose the ozone very well, where the ozone is one of the typical byproducts produced by the strong barrier discharge in the air. At that ozone decomposition process, dilute TCE (trichloroethylene) is also oxidized very well. The ozone decomposition generates single atomic oxygen which oxidizes TCE very well. The total performance of that alumina assisted plasma process is investigated. The specific energy density (SED) is only 10 J/L when the TCE decomposition efficiency is more than 99 % which is the least record in our experiments. Moreover, the carbon balance from TCE to carbon oxide is also more than 90 % at the SED of 90 J/L.
  • Nobuaki Oshima, Syouichi Inokuchi, Toru Kimura, Weihua Jiang, Kiyoshi ...
    2007 年 127 巻 3 号 p. 151-155
    発行日: 2007年
    公開日: 2007/06/01
    ジャーナル フリー
    The characteristics of a pulsed high-current generator has been studied for applications in extreme ultraviolet (EUV) generation. The objective is to clarify the electrical response of the generator circuit to the dynamic behavior of the discharge load. The experiments were carried out by driving a capillary discharge, where the plasma behavior is monitored by using high-speed camera and photodiodes. The generator performance is monitored by voltage and current probes. From the diagnostic results, the behavior of the last magnetic switch has become clear and the electrical efficiency of the generator system is obtained. The energy deposited in the capillary is calculated to be 4.5 J and the temporary plasma impedance at the peak current is observed to be 40 mΩ.
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