A CH
4/H
2 radio frequency capacitively coupled plasma used for synthesis of carbon nanotubes (CNTs) was simulated with a 1-dimensional fluid model. The pressure of CH
4 was fixed at 1 Torr and that of H
2 varied from 0 to 9 Torr. When the H
2 mixture ratio was 0.1, the fluxes of H
2+ and H
3+ to the substrate were respectively about 5 and 10 times those for the case without H
2 mixing. In our previous experiment, a slight mixture of H
2 promoted CNT growth. We inferred that this was because H
2 maintained the activity of the catalyst particle from which CNT grew. The present numerical result supports our hypothesis. In addition, C
xH
y (
x,
y ≥ 2) accumulated with time. This accumulation is not negligible because it lowers the electron temperature. We estimated the H
2 ionization rate in CH
4/C
xH
y is about 2/3 of that in CH
4. It is pointed out that we need to consider the accumulation of C
xH
y to improve the accuracy of the estimation of CNT growth.
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