This paper deals with a high speed direct drive hydraulic servo valve (linear servo valve, LSV) using linear DC motor (LDM). The nozzle-flapper type hydraulic servo valves and proportional valves driven linear electromagnetic solenoid are widely used in factory automation. High speed and high precision hydraulic valves have been required, because these conventional valves involve problems in efficiency, contamination and low-speed.
In this paper, the following points are discussed:
(1) The static thrust distribution of the LDM in the range of rated stroke ±0.5mm of the LSV have good flat characteristics. The static thrust of the LDM is not in proportion to exciting current, because of magnetic force generated by permanent magnet and yoke. It is clarified that this phenomenon is not matter in practical application for the LSV.
(2) The flow force characteristics acting on the LDM are evaluated on two spools. The flow force of an improved spool is decreased by circulating the flow in a compensation bucket, and the flow force of a conventional spool is not decreased. The maximum flow force of the improved spool is equal 27% to that of the conventional spool.
(3) The LSV exhibits a dynamic response of a 90° phase lag at 500 Hz. It is clarified that the dynamic response of the LSV is above 67% higher than that of the conventional hydraulic valves. The LSV is able to reduce the control power including electric and hydraulic power to above 55% in comparison with the nozzle-flapper type hydraulic servo valves.
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