A pulsed power supply with sag compensation using controlled gradational voltage to increase the flatness of output waveforms has been developed.The sag compensation circuit consists of compensation units connected in series. Each compensation unit consists of capacitances, diodes, and semiconductor switches. The capacitances of each unit are charged with different voltages by 2
n (V
0, 2V
0, 4V
0, ···). The compensation voltages, which has 2
n-1 steps, is generated by switching the semiconductor switches of each unit in a binary sequence. Using this method, compensation voltage waveforms up to 6.2kV with 31 steps can be obtained with 5 compensation units. The sag compensation circuit has been adapted to a direct switch type pulsed power supply, which generates 7kV pulsed voltage with a pulse width of 700μs, thus realizing sag compensation.
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