5kV, 50A, 2MHz AC power supply for driving high peak and short pulse CO
2 lasers with a silent discharge has been developed. The developed power supply has a full-bridge inverter that combines four switches that connect power MOSFET with 6 in series and 4 in parallel. The inverter directly switches the high voltage of 5kV DC and converts the voltage directly into 2MHz AC. The developed power supply can output much higher electric power than a conventional one, because it doesn't have a step-up transformer with a large leakage-inductance. A peak laser power of 20kW, 7 times a conventional one, and a laser pulse width of 1
μsec, 1/10 of a conventional one, was obtained by using this power supply for silent discharge type CO
2 lasers.
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