We investigated three main advantages of the photocantilever, i.e., a microfabricated photocantilever with pn-junction type photodiode on its tip, compared to other NSOM probes. The tip of the photocantilever converts the sample-modulated evanescent light into scattered light that can be collected by the photodiode fabricated at the apex of the cantilever. We demonstrated efficient collection of the scattered light, i.e., the NSOM signal light, availability of simultaneous NSOM/AFM microscopy, and the good responsivity to visible light. The photocantilever-based NSOM signal is one order of magnitude larger than that reported for AFM-cantilever-based NSOM. The minimum detectable NSOM power that we obtained was several tens of pico watts. By locating the optical-lever laser spot for AFM regulation over 100μm from the pn-junction, the photocurrent generated by the laser spot can be reduces for NSOM measurement. This enables simultaneous NSOM/AFM using the photocantilever. The resultant NSOM lateral resolution is better than 20nm (λ/30) and vertical resolution is better than 5nm. The spectral response shows that the photocantilever responds to visible light and the spectral response has a peak at about 500nm. The photocantilever enables simultaneous near-field scanning optical microscopy and atomic force microscopy, which measure both optical and topographical distributions with nanometer-resolution.

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A new fabrication process of micromachines using anodic oxidized aluminium film has been developed. The aluminium oxide film was made by anodizing evaporated aluminium in H₂SO₄ solution with a constant voltage. For examples, a cantilever beams have been fabricated which is deflectable by electrostatics. And the Yong's modulus is determined from the resonance frequency of these beams, E=327GPa. From these results, we therefore conclude that anodic oxidized aluminium film is a good material of micromachines.

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A theoretical expression to calculate the strain on a circular diaphragm fixed at the circumference and the center has been derived to predict the sensitivity of a micro-diaphragm pressure sensor. Young's modulus and internal stress of several thin films used for the diaphragm of the sensor and their layered structures were measured. Using the measured data, it was confirmed that Young's modulus and internal stress for layered thin film structure can be calculated by a composite law. Two sensors were fabricated to verify the validity of the derived equations, and their sensitivity was measured and calculated. The measured and calculated sensitivities showed good agreement.

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