IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Volume 117, Issue 3
Displaying 1-10 of 10 articles from this issue
  • Current Status and Future Prospects
    Junji Kido
    1997 Volume 117 Issue 3 Pages 123-126
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
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  • Masahiko Mitsuhashi, Seishiro Ohya, Shiro Karasawa, Kenji Akimoto, Mas ...
    1997 Volume 117 Issue 3 Pages 127-131
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    A platinum infrared emitter by Joule's heat, about 0.5×0.5mm2 of a pattern size, has been fabricated with micro lithography process of the platinum film on a quartz glass substrate, A hafnium oxide buffer film was used. The heat characteristics of the emitter were examined with thermography and a spectroradiometer. The maximum temperature of the heating emitter is confirmed to be 600°C at least. The platinum film emitter has the emissivity less than 0.1 and is nearly equivalent to gray body in wavelength 4-14μm. The emissivities of ceramics films on the platinum film were investigated to obtain the higher emissivity. The emissivities of oxide ceramics thin films are different from that of bulk targets and less than them. In Corning 7059 thin films, however, the higher emissivity values rather than that of the target is obtained at film thickness 6.7μm in wavelength 7-11μm. The highest value of emissivity of the thick film was 0.96 at wavelength 9.5μm.
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  • Junya Kobayashi, Jun-ichi Kita, Katsumi Yoshino
    1997 Volume 117 Issue 3 Pages 132-136
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    Infrared chopper elements have been fabricated, utilizing the transient light scattering effect of ferroelectric liquid crystal with asymmetric waveform voltage drive. New elements can performed 12% of modulation degrees in around 10 microns region. A combination of an IR-chopper and a pyroelectric sensor is used to measure radiation intensity from black body at various temperatures to detect human body stationary. The new type of IR detector allows a pyroelectric sensor array easily to be developed to measure temperature distribution over large area. The detection has achieved 0.55°C noise equivalent temperature difference (NETD).
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  • Shinzo Yamakawa
    1997 Volume 117 Issue 3 Pages 137-141
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    This paper describes the alcoholic gas discrimination experiment using an artificial neural network pattern recognition technique and dye absorbance spectra patterns from a 32-channel fiber-optic sensor array with different dye coatings, whose absorption spectra change with alcoholic gas exposure. The 32-channel absorption spectra were simultaneously measured by using 13 band-pass filters and 32 photodiodes, and data-processed by the pattern recognition method. The gas recognition system has been successfully applied to discrimination of alcoholic gases having similar chemical sutucture and found to discriminate methanol, ethanol, 1-propanol, and 2-propanol.
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  • H. Nanto, Y. Douguchi, M. Kadota, J. Nishishita, M. Ikeda, T. Shinkawa ...
    1997 Volume 117 Issue 3 Pages 142-146
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    Intense photostimulated luminescence (PSL) is observed, for the first time, in X-ray-irradiated KClxBr1-x:Eu phosphor ceramics. The peak in the stimulation spectrum for PSL red-shifts with increasing the Br content of KClxBr1-x:Eu phosphor. The intensity of PSL with a peak at about 420nm increases linearly with increasing X-ray dose over the wide range. The KBr:Eu phosphor exhibits excellent fading characteristics at room temperature. These results strongly suggest that KClxBr1-x:Eu phosphor, especially KBr:Eu phosphor is useful as a material for two-dimensional image sensor for ionizing radiation.
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  • Ryo Miyake, Kouichi Tsuzuki, Takeo Takagi, Kazumichi Imai
    1997 Volume 117 Issue 3 Pages 147-154
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    A new type of chemical analysis system with a micro-machined absorptiometric flowcell was fabricated in order to evaluate the advantages of micro total analysis systems (μ-TAS). Two micro-mixers and an absorptiometric flowcell were integrated into the one-chip device with dimensions of 24mm×10mm×2mm. This device provided high sensitivity and allowed the miniaturization of other elements such as pump, battery, and reagent's bottle. Consequently, the whole size of the analysis system with the micro-device was 203mm×86mm×76mm, which was about 1/200 of the size of commercial systems (Hitachi FIA system) at volume ratio. Total consumption of reagents for one test was around 2μL, which was about 1/250 smaller than that of the commercial one. The correlation result by using a phosphate standard solution showed good linearity and high sensitivity (0.69Abs/ppm) which was ten times larger than that of the commercial one. These results clarified that μ-TAS had the capability to be superior chemical sensing systems.
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  • Khoro Takahashi, Toshiaki Sakamoto, Hiroaki Sasaki, Satoshi Takeuchi
    1997 Volume 117 Issue 3 Pages 155-159
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    Microchannel plates (MCPs) using photosensitive glass and lead-glass films for secondary electron multiplying have been developed. The channel pitch of the fabricated MCP was 116μm. The average value of the aspect ratio of the microchannels was about 7.9. Lead-glass films deposited on the internal surface of microchannels were prepared by the sol-gel method. The electron gain of about 94 was achieved at a dynode voltage of 600V.
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  • Satoshi Konishi, Kouji Matsushita, Tomoaki Goto, Hiroyuki Fujita
    1997 Volume 117 Issue 3 Pages 160-164
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    We have proposed the concept of distributed micro motion systems (DMMS) composed of micro cell array. We focused on the multi-layered fabrication process to integrate such micro devices as actuators, sensors and circuits for implementation of a micro cell array. In this case, each devices are produced on a separate substrate and connected together after fabrication. This paper describes the 3 dimensional (3-D) wire array which have been developed for the interconnection between these substrates.
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  • Shin-ichi Wakida, Takao Shibata, Masataka Yamane, Kunishige Higashi
    1997 Volume 117 Issue 3 Pages 165-169
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    Highly sensitive nitrate-selective field-effect transistors (nitrate ISFETs) were prepared by casting the FET gate insulator surface with 5 kinds of phosphate-ester based plasticizers, a nitrate-sensing material based on trihexadecyl-methylammonium nitrate and PVC matrix. The nitrate ISFETs with trioctylphosphate showed a linear response from 10-4.53mol dm-3 to 1mol dm-3. Using the most suitable nitrate-sensing membrane, we have prepared a prototype nitrate-checker composed of a nitrate ISFET and silver/silver chloride reference electrode and have demonstrated its preliminary application to real samples of rain water. We could obtain relatively good agreement of the values of nitrate concentration observed by the nitrate checker and conventional ion-chromatography and fairly good correlation coefficient between the both methods with 0.97.
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  • Jin-Woo Choi, Yong-Kweon Kim
    1997 Volume 117 Issue 3 Pages 170-174
    Published: February 20, 1997
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    A novel driving theory on the induction type electrohydrodynamic (EHD) pump driven by traveling electric fields without the temperature gradient is proposed. The equations of the generating pressure and the flow rate are derived. The EHD micropump is fabricated by micromachining technology and tested. The channel heights are 50μm, 100μm and 200μm respectively and the channel width is 3mm. The spacing and width of the electrodes are 40μm respectively. The maximum pressure is 70.3Pa, 35.4Pa and 17.2Pa at the frequency of 0.2Hz for each. channel height (50μm, 100μm and 200μm) and the maximum flow rate is 0.90×10-1μl/min, 1.88×10-1μl/min and 4.85×10-1μl/min at the frequency of 0.4Hz for each channel height.
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