電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
119 巻, 4 号
選択された号の論文の15件中1~15を表示しています
  • 藤村 貞夫
    1999 年 119 巻 4 号 p. 177
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
  • 斉藤 文彦
    1999 年 119 巻 4 号 p. 178-183
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    An area of uneven brightness is a typical defect which influences the screen quality of a LCD display. This paper describes a method to detect an uneven area on a LCD using a genetic algorithm based on perceptive grouping factors in Gestalt psychology. Because the contrast of an uneven area is very low, the boundary of the uneven area is often discontinuous and many noises occur to surroundings. To extract a visual continuous boundary of the uneven area in such an image, a group of points is recognized as a curve by evaluating proximity and continuity in relative positions of points. Candidates for points to compose a visual curve are extracted effectively using a genetic algorithm. The experimental results show that extracted boundaries of uneven areas on LCDs by the proposed method were similar to forms of boundaries perceived by the visual sense.
  • D.M.G. Preethichandra, Katsunori Shida
    1999 年 119 巻 4 号 p. 184-188
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    A multifunctional sensing approach is presented in this paper to monitor automobile engine oil condition more methodically. Here in this research we have developed a novel single sensor which could measure three different parameters namely, viscosity, cleanness and the temperature of an engine oil sample, which are the essential parameters to be measured to make a decision on its condition. The outcome of this research proves that our proposed sensor can be used to make a clear decision on the engine oil condition.
  • Jun-ichiro Yuji, Katsunori Shida
    1999 年 119 巻 4 号 p. 189-193
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    For realizing an artificial skin-sensing device with multi-sensing functions, this paper proposes a discriminating method of three mixed tactile information, that is, contact force, temperature change and contact situation on surface models, using pressure-temperature sensitive materials despite one contact. The proposed discriminating method has two discrimination processing stages. First stage is a discrimination of only a temperature change. Second stage is a discrimination of a contact force and a contact situation at the same time. To demonstrate the proposed discriminating method, we adopted pressureconductive rubber sheets as pressure-temperature sensitive materials into tactile sensor materials because the rubber sheet has also a temperature dependency. A trial self-heating type pressure-conductive rubber tactile sensor is compared with one of the minute sense receptors of the human skin in this study. The ability of the trial tactile sensor was tested on various contact conditions using typical object samples. As experimental results, the usefulness of the proposed discriminating method was demonstrated.
  • 石田 寛, 櫛田 直也, 山中 高夫, 中本 高道, 森泉 豊栄
    1999 年 119 巻 4 号 p. 194-200
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    A new method to find a gas/odor source is proposed. A portable gas sensor array was fabricated by arranging 5×5 pulse drive semiconductor gas sensors, and was used to visualize the flow of a target gas. The direction of the flow is estimated by an image processing algorithm, and the gas source can be located by tracking the obtained direction. The redundant information from the sensor array is expected to enhance the reliability of the obtained direction compared with the case of a few sensors, especially under the environment with large wind turbulence and/or a quite slow wind field. The experiment in a wind tunnel revealed the soundness of the basic idea. The direction of the gas flow of 1_??_2cm/s, lower than the limit of our previous system, has successfully been estimated by the fabricated system.
  • 小塚 一宏, 棚橋 巌, 西村 良博, 石川 爽一, 山本 新
    1999 年 119 巻 4 号 p. 201-208
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    In this paper a gate access control system using a microwave identification (ID) tag system is presented. A read/write microwave ID tag system powered by a battery has been developed. The main features of this ID tag system as a stand alone tag are high data transmission rate (2.4kbytes/sec) and low power consumption. A prototype gate access control system using this ID tag system at automobile assembly plants has been developed. For this system, 120 byte data transmission has been typically attained at vehicle speed of 50km/h. This system was applied to the traffic control of delivery trucks in automobile assembly plants. The system has been successfully stood various tests for 1 year. The data retransmission of the system was 0.25% of 15, 000 access but there was no transmission error, thus the prototype system is effective for gate access control in plants.
  • 王 欣雨, 劉 忻, 篠田 裕之
    1999 年 119 巻 4 号 p. 209-214
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    In this paper we propose a novel sensor measuring tongue motions and apply it to a pronunciation learning system. It is said that Chinese is difficult because its' pronunciation varies in subtle based on the tongue positions. Therefore it will be helpful if we can confirm the tongue's position on our learning of the pronunciation. Our proposal is a sensor to measure the position of tongue by three pieces of optical fiber. Two of them are connected with LD and LED, and the other receives the reflected light. The position is measured by the ratio of the two reflected lights. After examining the sensor's performance, we equip it on a human head and measure a series of tongue positions while Chinese is spoken.
  • 西 一樹, 安藤 繁
    1999 年 119 巻 4 号 p. 215-220
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    An optimal harmonics extraction filter with pitch fluctuation from the noise-corrupted observation is proposed. It is derived as a solution to the Kalman-Bucy filter in which the pitch fluctuation is treated as a state-dependent noise. The analytical solution provides the frequency characteristic which consists of constant-Q pass-bands just located on each harmonic frequency. This remarkable structure is well suited to the increasing harmonic fluctuation in direct proportion to the harmonic frequency. Simulation results show that this filter has a robustness to the pitch estimation error and fluctuation. Examples of the filter design are presented, and the performance of sound extraction is examined by comparison with conventional filters.
  • 井上 悟, 亀井 光仁, 伊藤 隆史, 高嶋 和夫, 宇佐美 照夫, 実森 彰郎
    1999 年 119 巻 4 号 p. 221-228
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    The authors describe in this paper the application of a semiconductor pressure device for a pressure monitoring sensor, applicable to both continuous monitoring and fault locating of a gas insulated switchgear (GIS). Improvements required for these purposes are long term stability against temperature and supersensitivity for detecting a minute pressure variation caused by the fault. To get high sensitivity over a wide range, the amplifier having changeable ranges are presented. To compensate the output fluctuation due to temperature, we introduce a current driven circuit, a current source designed to have opposite characteristics to the piezzo resistance of the semiconductor and a digital compensation method. Offset drift by temperature is solved by use of AC drive. The temperature stability of the sensor consequently come at 0.01%. For high SN ratio required for the fault locating, we adopt digital filters, and pattern matching. The sensor is achieved 10Pa sensitivity with 700kPa dynamic range.
  • Hiroshi Ueno, Makoto Hosaka, Osamu Tabata, Satoshi Konishi, Susumu Sug ...
    1999 年 119 巻 4 号 p. 229-235
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    In order to develop a practical LIGA process, a high contrast X-ray mask with a SiC membrane was produced. The X-ray mask was composed of a 3μm thick Au as an absorber, a 2μm thick SiC as a membrane of dimensions 10mm × 30mm and a 2mm thick Si of dimensions 3 inch as a frame. A feature of the X-ray mask is the application of a SiC membrane, which has high permeability to X-rays, high thermal conductivity and moderate tensile stress. As a result, Ni microstructures with a maximum aspect ratio of 100, corresponding to 2μm width and 200μm height, were fabricated by the LIGA process.
  • Yoshiyuki WATANABE, Takashi MINETA, Seiya KOBAYASHI, Kenya SHIBATA
    1999 年 119 巻 4 号 p. 236-241
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    The microassembly technique on the wafer is key technology to realize multi-axis sensors (e. g. magnetometer) or three-dimensional micro systems (e. g. an optical system). We have investigated the bending of a polyimide/chromium cantilever to lift a silicon island (400×300×10μm3 and 1000×1000×240μm3) on the wafer at an angle of 90°, the planarization of a diced silicon sidewall and the bonding of a silicon island to the planarized silicon sidewall with polyimide interlayer. With this microassembly technique, the three-dimensional single crystalline silicon structures have been fabricated.
  • Katsuto Oyama, Mitsuteru Kimura
    1999 年 119 巻 4 号 p. 242-246
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    A pn junction photo-cell with an optical fiber coupling is fabricated as a power supply for Micromachines and its fundamental characteristics are evaluated. The photo-cell consists of two V-grooves spaced out 50μm apart and parallel each other, and a light receiving region between them. The pn junction is formed in a single side of one of two V-grooves and p+ diffusion layer is formed in a single side of the other groove. Since carrier collection efficiency of the photo-cell is more improved than a conventional planar type one, the conversion efficiency is very improved. An opto-electric transformer is fabricated as a combination of V-groove type photo-cell and a bulk transformer for voltage stepping-up. The modulated light with a rectangular waveform is used instead of dc light because of using transformer. The secondary output voltage of 1.5V is obtained for the primary input voltage of 0.3V at the frequency of 100kHz according to the turns ratio of the transformer.
  • 大坪 義一, 山本 昌彦, 田所 論, 高森 年
    1999 年 119 巻 4 号 p. 247-253
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    The conventional stereolithography method has a weak point which is necessary to long time to fabricate because of exposing resin along the each point of the structure. New type micro stereolithography equipment, which is plane irradiation type micro stereolithography with optical fibers, has been developed in order to overcome this problem. The developed system consists of ultraviolet light source, shutters and five optical fibers in a line arrangement as a variable shape mask. The variable shape mask is enable to copy desired shape on the resin. This paper describes the design of the mask using simulation analysis of light power distribution from optical fiber and confirmation of availability of this equipment from curing experiments of resin. As a result of the curing experiment, the time required to fabricate a shape of star structure in the proposed method is two times as fast as the conventional method.
  • 王 占杰, 前田 龍太郎, 菊地 薫
    1999 年 119 巻 4 号 p. 254-259
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    The Pb(Zr1-xTix)O3, (PZT) of thickness of 3μm was fabricated using Sol-Gel spinning-coating onto Pt/Ti/SiO2/Si substrates. The preferred orientation of the PZT films was observed using X-ray diffraction analysis (XRD) and the microstructure was investigated using scanning electron microscopy (SEM). The preferred orientations in the direction of the (100) plane were obtained using the treatment for pyrolysis at 573K and for crystallization at 823K. The present PZT films showed dielectric constants about 1200. Ferroelectricity of these films was established with the values of the remnant polarization of 12.5μC/cm2 and the coercive field of 29.0kV/cm.
  • 長岡 新二
    1999 年 119 巻 4 号 p. 260-265
    発行日: 1999/04/01
    公開日: 2008/12/19
    ジャーナル フリー
    This paper describes the optical, mechanical, and magnetic design of compact latching type single-mode fiber switches and demonstrates their characteristics including several reliability tests.
    To reduce the switch size and power, we designed a simple electro-magnetic driving mechanism composed of a solenoid coil and magnets that can move an ultra-light micro-magnetic-alloy pipe fixed on a movable fiber. Insertion loss and reflected light were reduced by injecting refractive- index-matching oil into the switches. We investigated precise optical coupling condition between a movable fiber and stationary fiber in terms of magnetic attraction forces.
    The fabricated 1×2 switches exhibited a low insertion loss of 0.31dB, a high return loss of 51dB, a relatively fast switching time of <2ms, and low driving power of 9mW. When subjected to endurance (108 switchings), heat cycle, shock and vibration, and long-term (6.5years) intermittent operating tests, they revealed no significant optical or mechanical degradation.
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