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Volume 120, Issue 8-9
Displaying 1-8 of 8 articles from this issue
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Chih-Kung Lee, Giin-Yuan Wu2000 Volume 120 Issue 8-9 Pages 381-385
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSDownload PDF (1051K) -
Takashi Nishimura, Shinzo Yoshikado2000 Volume 120 Issue 8-9 Pages 386-391
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSEtching characteristic of LiNbO3 has been investigated using plasma RIE. Etch rate increased in propotion to the atomic weight of inert gas in CF4+inert gas(He, Ne, Ar, Kr, Xe) plasma. It was improved about 20 times in CF4+Xe plasma in comparison with wet process in HF aquaus solution. As etch time increased, etching surface form became rough in CF4+inert gas plasma. Simirally, as RF bias increased, same result was obtained. It is found that this surface roughness is caused by the increase of the substrate temparature by an ion bombardment effect and can be removed by cooling the substrate.View full abstractDownload PDF (2959K) -
Tetsuhiko Iizuka, Hiroyuki Fujita2000 Volume 120 Issue 8-9 Pages 392-397
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSThis paper deals with the driving principle and the experimental demonstration of a micro motor which can convert the rotation into the linear motion and generate the large displacement. The motor is a wobble type one; its rotor and stator have screw threads. When the rotor turns, it moves linearly in the axial direction like a screw. The range of the linear motion is limited only by the length of the rotor. We have fabricated a threaded wobble motor by the electro-magnetic actuation and operated it successfully.View full abstractDownload PDF (2580K) -
Toshiaki Oguchi, Masanori Hayase, Takeshi Hatsuzawa2000 Volume 120 Issue 8-9 Pages 398-404
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSThe bending process of a cantilever with constant bending moment driven by the electro-static force is theoretically investigated. According to this analysis, the cantilever has seven deformation modes and five types of mode transition processes. They are categorized by relationship between bending moment of the cantilever and position of a stop layer which is located between a substrate electrode and the cantilever in order to restrict hysteresis movement and to realize precise movement and high speed driving. As long as the cantilever deformation is small, linear analysis is confirmed to be a good approximation and gives unique solutions.View full abstractDownload PDF (985K) -
Kazuhide Sugiura, MyoengSoo Oh, Kiyoharu Aizawa2000 Volume 120 Issue 8-9 Pages 405-409
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSIn this paper, we propose a new focal plane A/D conversion for digital smart sensors. The proposed A/D converter is pixel-parallel architecture. The circuit for each pixel has a current mode comparator, multiple current mirrors and two shift registers. The design and the preliminary simulation are shown.View full abstractDownload PDF (1411K) -
Takayuki Kimura, Noboru Takatsuka, Takanori Arano, Hiromitsu Shiraki2000 Volume 120 Issue 8-9 Pages 410-416
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSPrinciples of the two-dimensional image reproduction including frequency components higher than Nyquist frequency of an image sensor were considered, and resolution progress of an image sensor by digital signal processing was simulated on computer. Simulated imaging device is the two-dimensional (area) image sensor. After the simulation, it is difficult to find the differences between the original and the reproduced image by the naked eye. The reproduced images that have frequency components twice higher than Nyquist frequency were successfully obtained. Using this method, it is possible to enhance the resolution of conventional image sensor twice as high as its inherent resolution without any modification to the image sensor.View full abstractDownload PDF (3087K) -
Masahiro Ota, Tomohiko Nakao2000 Volume 120 Issue 8-9 Pages 417-425
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSA laser opto-microactuator in which optical energy is supplied by a laser beam is proposed. The opto-microactuator is rotated by molecular gas dynamics effects. The effects of the molecular weights of gases on opto-microactuator are revealed by numerical simulations. The direct simulation of Monte Carlo (DSMC) method numerically simulates gas molecular motion around the microactuator. The macroscopic gas flows are visualized from the numerical results of the DSMC method. The numerical results show that gas pressure differences between front and rear blade-surfaces of the microactuator-rotors dependent on the molecular weights of the gases.View full abstractDownload PDF (1161K) -
Yoichi Haga, Shigeo Maeda, Masayoshi Esashi2000 Volume 120 Issue 8-9 Pages 426-431
Published: August 01, 2000
Released on J-STAGE: April 01, 2009
JOURNAL FREE ACCESSNew fabrication method of small diameter tubular structures which are suitable for active catheters and active guide wires was developed. These tubular structures consist of metal spring coil and evaporated parylene membrane. An anticoagulant polyurethane is used as outer membrane structure. Fabrication process is simple and the fabricated tubes are kink-free and buckling-free in spite of its flexibility and thin wall.View full abstractDownload PDF (4125K)
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