IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 126, Issue 1
Displaying 1-4 of 4 articles from this issue
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Paper
  • A New Multifunctional Space Angle Sensor Using Capacitance Method
    Chuantong Wang, Katsunori Shida
    2006 Volume 126 Issue 1 Pages 1-6
    Published: 2006
    Released on J-STAGE: April 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.1
    JOURNAL FREE ACCESS
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    In this study, we propose a novel ball form multifunctional sensor which can measure azimuth and elevation angle at the same time, and rotating speed is also sensed. We use 4 electrodes arranged on the surface of a ball which is half filled with water. Since water will keep aclinic when the ball leans to any direction, the capacitance between electrodes will change correspondingly. Steady rotating speeds lead to different curves on the surface of water which changes the dielectric distribution of capacitances between electrodes. We use 3 capacitances to determine the space angle and rotating speed. The output functions of sensor and corresponding input value reconstructing method are furthermore proposed. Experiment and analysis results show that it is effective to sense 3 inputs by this multifunctional sensor.
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  • Fabrication of Plastic Micro Tip Array using Laser Micromachining of Nanoparticles Dispersed Polymer and Micromolding
    Hiromasa Yagyu, Shigehiko Hayashi, Osamu Tabata
    2006 Volume 126 Issue 1 Pages 7-13
    Published: 2006
    Released on J-STAGE: April 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.7
    JOURNAL FREE ACCESS
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    An injection molded plastic micro tip array was fabricated. First, an inversed conical hole with a sharp tip and a high aspect ratio was fabricated by irradiating a low power output Nd:YVO4-SHG laser beam for several milliseconds on Au nanoparticles dispersed ethylcellulose. Then, an epoxy micro tip array was fabricated by the cast method using the inversed conical hole as a mother structure. This was followed by nickel electroforming to make a nickel-mold mother. Finally, plastic injection compression molding was carried out to form the final plastic micro tip array. By optimizing several processing parameters, a polyethylene micro tip array with a height of about 100 μm and a diameter of about 50 μm was successfully realized.
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  • Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures
    Tomomi Sakata, Hiromu Ishii, Yuichi Okabe, Norio Sato, Masao Nagase, T ...
    2006 Volume 126 Issue 1 Pages 14-18
    Published: 2006
    Released on J-STAGE: April 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.14
    JOURNAL FREE ACCESS
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    This paper describes the electrodeposition characteristics of an organic insulator film on a gold surface. In the electrodeposition, there are two reaction patterns depending on the solution temperature. Below around 30°C, the film thickness saturates regardless of deposition time after it rapidly increases. On the other hand, above around 30°C, the film thickness gradually increases with time and does not saturate. Using the solution temperature of 30°C, the organic dielectric was deposited to coat microelectromechanical-system structures. The deposition was confirmed to occur only on the gold electrode to which a voltage was applied. The fabricated structures with the coated electrodes were protected from the electrical shorts between the actuator and the gold electrode, even though pull-in occurred.
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  • Composition Dependence of Gas Diffusion Membrane on Sensor Characteristics for Detection of Toxic Gases
    Yoshitaka Mizutani, Hiroyuki Matsuda, Toru Ishiji, Nagakazu Furuya
    2006 Volume 126 Issue 1 Pages 19-23
    Published: 2006
    Released on J-STAGE: April 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.19
    JOURNAL FREE ACCESS
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    A superior electrochemical gas sensor has been developed by using a novel gas diffusion membrane consisting of carbon powder and poly-fluorocarbon for the detection of toxic gases. The gas permeability of the gas diffusion membrane depends on the poly-fluorocarbon composition in the membrane. With a decrease of the poly-fluorocarbon composition in the membrane, the electrochemical gas sensor shows high sensitivity for the detection of toxic gases, such as arsine and silane.
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