電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
130 巻, 10 号
選択された号の論文の14件中1~14を表示しています
特集:細胞マイクロシステム
特集論文
論文
  • 安井 学, 荒井 政大, 高橋 正春, 伊藤 寛明, 井野 友博, 金子 智, 平林 康男, 前田 龍太郎
    2010 年 130 巻 10 号 p. 484-488
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル フリー
    The Mems-ONE is well known software which simulates thermo-viscoelastic properties in the conduct of nanoimprinting. Assuming the glass materials to be viscoelastic body, the relaxation shear modulus was measured by the creep test, Williams-Landel-Ferry (WLF) equation is applied for expressing the temperature dependence of liquid viscosity. We compared experimental with analytic results used by Mems-ONE with the condition of fixed pressure and time. Thermo-viscoelastic properties of the glass materials were estimated using unidirectional compression creep test based on traditional thermo viscoelastic theory. Glass was Borosilicate Glass (D263, Schott). Glass imprinting was carried out on Glassy Carbon (GC) mold with line & space10 μm patterns fabricated by dicing saw. The machining accuracy is most important thing as the evaluation mold. The glass imprinting temperature consulted thermo-viscoelastic properties of the glass materials. The numerical simulation was carried out on the small portion of mold and glass. The constant value of WLF equation fitting in high temperature translates the master curve of D263 with a high degree of accuracy. It caused the accuracy improvement of analysis result. In addition, we confirm that WLF equation intended to resin can use to the glass imprinting.
  • 河野 秀美, 松本 佳宣
    2010 年 130 巻 10 号 p. 489-494
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル フリー
    In this research, one-axis high sensitive and low power consumption inclination sensor has been developed. The electric resistance of fluid between two electrodes is used to realize the sensor. A cap was attached to PCB board on which three electrodes were patterned. And propylene carbonate was encapsulated in it. Equivalent circuit model of the sensor was modeled using AC impedance method. DC and AC voltage were applied to a semicircle electrode, the other electrode was grounded and the voltage of an arc electrode was measured. The AC sensitivity was six times higher than the DC sensitivity at Vdd=5V. The sensor can operate even at low AC voltage of 1V. In addition, custom driving and detection circuit were developed and evaluated for practical application.
  • 丹保 豊和, 宮本 祐次, 坂下 周平, 柴田 幹
    2010 年 130 巻 10 号 p. 495-500
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル フリー
    We have proposed and investigated the properties of five-photodiode light sensor (5PD light sensor) which is able to search and track the solar light in the sky. In the present paper, we have focused the estimation about the orientation and declination of the 5PD light sensor regarding the plane of the top photodiode. Those are defined by the rotation of the azimuth and the declination of the elevation at the rotated angle. The rotation and the declination are originated to compare the solar directions between the calculation of solar orbit and the measurement using tracking function of the 5PD light sensor. The derivation is shown, and the estimation is performed on a typical example.
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